The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2003
Filed:
Mar. 29, 2001
Harlan I. Halsey, Woodside, CA (US);
Dave E. Jacob, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
The present invention provides a diffuser and a chamber for venting and/or pumping gas. The diffuser includes a body, a reflector, and a set of vanes. The body includes a nozzle through a center portion and has a curved surface on an upper side to define an open space above the curved surface. The nozzle is arranged to allow a gas to flow through and expand in the nozzle. The reflector is disposed over the nozzle and is arranged to reflect the gas from the nozzle into the open space in the body while expanding the gas flow. The vanes further divide the flow into roughly equal portions. In this configuration, the flow of the gas is slowed in the nozzle, the reflector portion, and the open space in the body between the vanes so that the gas flows out of the open space with substantially uniform low velocity.