The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2003
Filed:
Mar. 30, 2001
Applicant:
Inventors:
Harlan I. Halsey, Woodside, CA (US);
David E. Jacob, Fremont, CA (US);
Assignee:
Lam Research Corp., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 4/300 ;
U.S. Cl.
CPC ...
B65G 4/300 ;
Abstract
A method for creating a reduced particle environment in a localized area of a mechanically active transport interface is provided. The augmentation of the air flow results in a sweeping air flow to remove particles in and around the desired area. The augmented air, flow will eliminate static or turbulent air flow regions and assist in removing potential particles from the vicinity of the substrate. This will prevent particles from being deposited on substrates thus fostering higher yields and improved quality.