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For the Inventor, By the Inventor

Chennai, India

Hari Pathangi Sriraman

This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Kla Tencor Corporation. Active years: 2019-2020.

USPTO Granted Patents = 3 

% Patents Active = 100.0

Average Co-Inventor Count = 1.3

ph-index = 2

Forward Citations = 8(Granted Patents)


Company Filing History:

goldMedal3 out of 1,787 
 
Kla Tencor Corporation
 patents

Years Active: 2019-2020

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3 patents (USPTO):Explore Patents
1. 10679333 - Defect detection, classification, and process window control using scanning electron microscope metrology (2020-06-09),
2. 10529534 - Compensating for scanning electron microscope beam distortion-induced metrology error using design (2020-01-07),
3. 10359706 - Integrated scanning electron microscopy and optical analysis techniques for advanced process control (2019-07-23),
Profile summary based on public USPTO records.
Please report any incorrect information to [email protected]
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