Location History:
- Tokyo, JP (2000 - 2003)
- Hyogo, JP (2000 - 2003)
Company Filing History:
Years Active: 2000-2003
Title: Innovative Contributions of Hajime Kimura in Semiconductor Technology
Introduction
Hajime Kimura, an accomplished inventor based in Hyogo, Japan, has made significant strides in the field of semiconductor technology. With a total of six patents to his name, Kimura is recognized for his innovative approaches to enhancing semiconductor devices.
Latest Patents
One of Kimura's latest patents focuses on a semiconductor device and the method of manufacturing such a device. The innovation aims to achieve an upward leap in the capacitance of capacitors with MIM (metal/insulator/metal) structures, while simultaneously improving the reliability of semiconductor devices. The method includes several critical steps such as forming an amorphous silicon film on the surface of a lower electrode of a capacitor, roughening this silicon film to create rough polysilicon, and etching the metal film of the lower electrode using the rough polysilicon as a mask. By increasing the surface area of the capacitor, Kimura's approach effectively enables the fabrication of large-capacitance capacitors within MIM structures.
Furthermore, his method of manufacturing a semiconductor device involves creating a polycrystalline silicon film and a tungsten silicide film on a silicon substrate, followed by the formation of an insulating film that serves as a hard mask. By utilizing a photoresist pattern and anisotropically etching the insulating film, Kimura manages to create a mask material with precise dimensions, thus preventing any variations in the thickness of the mask material from affecting the semiconductor substrate.
Career Highlights
Working at Mitsubishi Electric Corporation, Kimura has continually pushed the boundaries of semiconductor technology. His dedication to innovation has made him a valuable asset in the development of advanced electronic components.
Collaborations
Hajime Kimura has had the opportunity to collaborate with esteemed colleagues, including Kenji Kawai and Kazuyuki Ohmi. Together, they contribute to the enhancement and development of cutting-edge technologies within their field.
Conclusion
In summary, Hajime Kimura's contributions to semiconductor technology are noteworthy, particularly through his innovative patents and collaborations. His work not only advances the field but also exemplifies the spirit of invention that drives technological progress in Japan and beyond.