Haili Jia

Title: Haili Jia: Innovator in Photolithography Technology

Introduction

Haili Jia is a notable inventor based in Shanghai, China. He has made significant contributions to the field of photolithography, particularly through his innovative patent. His work focuses on enhancing the precision and efficiency of lithography machines, which are essential in semiconductor manufacturing.

Latest Patents

Haili Jia holds a patent for a "Lithography machine workpiece table and vertical position initialization method thereof." This invention features a fine-motion module designed for use in a wafer stage of a photolithography tool. The module includes a base, a fine-motion plate, and multiple vertical motors fixed between the base and the fine-motion plate. Additionally, it incorporates gravity compensators that support the fine-motion plate and absolute-position sensors that measure its position. These sensors adjust the pressures in the gravity compensators to ensure the fine-motion plate reaches a predetermined initial vertical position. Relative-position sensors further enhance the system by measuring the fine-motion plate's position relative to the base, allowing for precise control.

Career Highlights

Haili Jia is currently employed at Shanghai Micro Electronics Equipment (Group) Co., Ltd. His role involves working on advanced technologies that improve the performance of photolithography equipment. His expertise in this area has positioned him as a key player in the industry.

Collaborations

Haili collaborates with talented individuals such as Feihong Liao and Yuebin Zhu, who contribute to the innovative environment at Shanghai Micro Electronics Equipment. Their teamwork fosters creativity and drives advancements in photolithography technology.

Conclusion

Haili Jia's contributions to the field of photolithography through his patent and work at Shanghai Micro Electronics Equipment highlight his role as an influential inventor. His innovations are paving the way for advancements in semiconductor manufacturing.