Haijun Song

Title: Haijun Song: Innovator in Silicon Wafer Processing

Introduction

Haijun Song is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of silicon wafer processing, holding two patents that showcase his innovative approach to technology.

Latest Patents

One of his latest patents is a silicon wafer processing device and method. This invention features a pre-aligned optical assembly and an edge exposure assembly on a synchronous bi-directional motion module. This design reduces the occupied space of the device and saves installation costs. Additionally, the operational complexity is minimized through a control assembly that manages the synchronous bi-directional motion module, rotation unit, and position compensation unit. This allows for simultaneous movement of the pre-aligned optical assembly and edge exposure assembly, enabling efficient processing of silicon wafers of various sizes. Another notable patent is a focusing leveling device, which includes an illumination light source, an illumination lens group, and a detecting unit. This apparatus is designed to create a series of linearly arranged light spots from non-linearly arranged marks, enhancing measurement accuracy.

Career Highlights

Haijun Song has worked with notable companies such as Shanghai Micro Electronics Equipment (Group) Co., Ltd. and Shanghai Micro Electronics Equipment Co., Ltd. His experience in these organizations has contributed to his expertise in the field of microelectronics and wafer processing.

Collaborations

Throughout his career, Haijun has collaborated with talented individuals, including Gang Wang and Yichao Shi. These partnerships have fostered innovation and development in his projects.

Conclusion

Haijun Song's contributions to silicon wafer processing through his patents and career achievements highlight his role as a key innovator in the field. His work continues to influence advancements in microelectronics technology.