Shanghai Micro Electronics Equipment (Group) Co., Ltd.

Shanghai Micro Electronics Equipment Co., Ltd.

Haijun Song

Gang Wang

Feibiao Chen

Jie Jiang

Dongliang Huang

Yichao Shi

Kan Lu

Disclosed is a silicon wafer processing device; a pre-aligned optical assembly and an edge exposure assembly are provided on a synchronous bi-directional motion module, reducing the occupied space of the device and saving the installation cost; and furthermore, a synchronous bi-directional motion module, a rotation unit and a position compensation unit on a bottom plate are controlled by means of a control assembly, so as to reduce the operational complexity; and moreover, the synchronous bi-directional motion module is controlled to drive the pre-aligned optical assembly and the edge exposure assembly to simultaneously move, so that the operations of pre-aligning and edge exposure can be performed on silicon wafers of different sizes, thereby saving the switching time and increasing the work efficiency. Further disclosed is a method for processing a silicon wafer using a silicon wafer processing device.

Silicon wafer processing device and method

A focusing and leveling apparatus, including: an illumination light source () for emanating a light beam; an illumination lens group (), a projecting unit, an object () being measured, a detecting unit, a refractive unit, a relay lens group and a photoelectric detector (), disposed sequentially in this order in a transmission path of the light beam. The projecting unit includes projection slits () defining a plurality of non-linearly arranged marks, such that after passing sequentially through the illumination lens group (), the projecting unit, the object () being measured and the detecting unit, the light beam emanated by the illumination light source () becomes a plurality of non-linearly arranged sub-beams corresponding to the plurality of marks. The refractive unit is so configured that after passing through the refractive unit, the plurality of sub-beams form a plurality of linearly arranged light spots.

Focusing leveling device

Growing community of inventors

Shanghai, China

Haijun Song