Hae Young Kim

Title: Hae Young Kim: Innovator in Semiconductor Technology

Introduction

Hae Young Kim is a prominent inventor based in San Jose, California, known for his significant contributions to semiconductor technology. With a total of 11 patents to his name, he has made remarkable advancements in the field of thin films and deposition methods.

Latest Patents

Among his latest patents is the technology related to conformal titanium silicon nitride-based thin films and methods of forming the same. This technology focuses on creating titanium nitride-based thin films that are both conformal and smooth. The method involves forming a diffusion barrier comprising TiSiN with a modulus exceeding 290 GPa and a silicon content exceeding 2.7 atomic percent. This is achieved by exposing a semiconductor substrate to alternating deposition phases of titanium and nitrogen precursors. Another notable patent involves the formation of smooth titanium nitride layers through atomic layer deposition on a seed layer, which includes a semiconductor substrate with a non-metallic surface.

Career Highlights

Hae Young Kim has worked with several companies throughout his career, including Eugenus, Inc. and Aixtron SE. His work has significantly impacted the development of semiconductor technologies, particularly in the area of thin film deposition.

Collaborations

Some of his notable coworkers include Bunsen B. Nie and Sung-Hoon Jung, who have collaborated with him on various projects in the semiconductor field.

Conclusion

Hae Young Kim's innovative work in semiconductor technology, particularly in the development of titanium nitride-based thin films, showcases his expertise and dedication to advancing the field. His contributions continue to influence the industry and pave the way for future innovations.