Guo Liu

Title: Guo Liu: Innovator in Molybdenum and Ruthenium Film Technologies

Introduction

Guo Liu is a prominent inventor based in Somerville, NJ (US), known for his contributions to the field of materials science. He holds a total of 4 patents that focus on advanced methods for forming molybdenum and ruthenium-containing films. His innovative approaches have significant implications for various applications in semiconductor and materials engineering.

Latest Patents

Liu's latest patents include groundbreaking methods for forming molybdenum-containing films deposited on elemental metal films. These methods involve thermally depositing a first film on a substrate surface at a temperature of about 400° C or lower, followed by the deposition of a molybdenum-containing film at a higher temperature. The first film can consist of elemental metals such as tungsten, molybdenum, ruthenium, or cobalt, while the second film is a reaction product of a molybdenum-containing precursor and a reducing agent.

Another notable patent focuses on the vapor deposition of ruthenium using an oxygen-free co-reactant. This method involves delivering at least one precursor and an oxygen-free co-reactant to a substrate to form a ruthenium-containing film. The process includes annealing the film under vacuum or in the presence of inert gases, enhancing the quality and performance of the resulting films.

Career Highlights

Guo Liu is currently employed at Merck Patent GmbH, where he continues to push the boundaries of innovation in materials science. His work has not only advanced the understanding of film deposition techniques but has also contributed to the development of new materials with enhanced properties.

Collaborations

Throughout his career, Liu has collaborated with notable colleagues, including Charles Dezelah and Jacob Woodruff. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and expertise, further driving innovation in their respective fields.

Conclusion

Guo Liu's contributions to the field of materials science, particularly in the development of molybdenum and ruthenium film technologies, highlight his role as a leading inventor. His patents reflect a commitment to advancing technology and improving material performance, making a significant impact in the industry.