The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2021
Filed:
Feb. 17, 2017
Applicant:
Merck Patent Gmbh, Darmstadt, DE;
Inventors:
Charles Dezelah, Somerville, NJ (US);
Jean-Sebastien Lehn, Somerville, NJ (US);
Guo Liu, Somerville, NJ (US);
Mark C. Potyen, Somerville, NJ (US);
Assignee:
MERCK PATENT GMBH, Darmstadt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/16 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C23C 16/16 (2013.01);
Abstract
Transition metal precursors are disclosed herein along with methods of using these precursors to deposit metal thin films. Advantageous properties of these precursors and methods are also disclosed, as well as superior films that can be achieved with the precursors and methods.