Company Filing History:
Years Active: 2009-2025
Title: Gregory Sexton: Innovator in Plasma Processing Technology
Introduction
Gregory Sexton, a prominent inventor based in Fremont, CA, has made significant contributions to the field of plasma processing technology. With 19 patents to his name, he stands out as a leading figure in developing innovative solutions in substrate processing systems.
Latest Patents
Sexton's recent innovations include the "Lower Plasma Exclusion Zone Ring for Bevel Etcher," which describes a substrate processing system designed to enhance plasma treatment efficiency. This system incorporates a lower plasma exclusion zone ring, strategically arranged below the substrate, along with an upper electrode during the plasma treatment process. The design is aimed at improving the bevel edge treatment of substrates, making it a substantial advancement in the field.
Another noteworthy patent is the "Tunable Upper Plasma Exclusion Zone Ring for a Bevel Etcher." This invention introduces an adjustable plasma exclusion zone that optimizes plasma distance during processing. The tunable upper ring features a horizontal portion and a conical upwardly tapered outer portion, allowing for precise adjustments in plasma treatment for 300 mm circular substrates. This patent not only improves processing efficiency but also offers flexibility during operation.
Career Highlights
Gregory Sexton is currently employed at Lam Research Corporation, where he applies his expertise in plasma processing technology. His innovative designs have contributed significantly to the company's reputation as a leader in the semiconductor manufacturing industry. Sexton’s work is pivotal in developing cutting-edge technologies that enhance substrate processing, furthering advancements in semiconductor fabrication.
Collaborations
Throughout his career, Sexton has collaborated with talented professionals, including his coworkers Andrew D. Bailey, III, and Alan M. Schoepp. These collaborations have fostered an environment of innovation and creativity, leading to numerous successful patents that demonstrate their collective expertise in the field.
Conclusion
Gregory Sexton's contributions to plasma processing technology underscore the importance of innovation in the semiconductor industry. With a robust portfolio of 19 patents and ongoing work at Lam Research Corporation, his impact on the field continues to grow. As technology advances, inventors like Sexton play a crucial role in shaping the future of substrate processing solutions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.