The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Mar. 14, 2011
Gregory S. Sexton, Fremont, CA (US);
Andrew D. Bailey, Iii, Pleasanton, CA (US);
Alan M. Schoepp, Ben Lomond, CA (US);
John D. Boniface, Santa Clara, CA (US);
Gregory S. Sexton, Fremont, CA (US);
Andrew D. Bailey, III, Pleasanton, CA (US);
Alan M. Schoepp, Ben Lomond, CA (US);
John D. Boniface, Santa Clara, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
Methods for orienting an upper electrode relative to a lower electrode are provided. The lower electrode is configured to have a desired existing orientation in a process chamber to define active and inactive process zones in the process chamber for processing a wafer. The method includes configuring each electrode with a reference surface, where a lower electrode reference surface is in the desired existing orientation and an upper electrode reference surface to be oriented parallel to the lower electrode reference surface. Then, temporarily holding the upper electrode reference surface oriented parallel to the lower electrode reference surface, and securing the upper electrode to a drive to mount the upper electrode reference surface parallel to the lower electrode reference surface. Other method configurations are also disclosed and illustrated.