Location History:
- Pleasanton, CA (US) (2014)
- San Jose, CA (US) (2014 - 2016)
Company Filing History:
4 out of 726 
1 out of 164,221 
1 out of 5,671 
Years Active: 2014-2016
Title: Gregory Nowling: Innovator in Semiconductor Processing
Introduction
Gregory Nowling is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor processing, holding a total of 5 patents. His work focuses on innovative methods for etching and processing semiconductor substrates, which are crucial for the advancement of technology in this area.
Latest Patents
One of Gregory Nowling's latest patents involves the wet etching of silicon containing antireflective coatings. This patent provides methods for processing semiconductor substrates by etching silicon containing antireflective coatings (SiARCs) while preserving silicon oxide layers. The etching solution includes sulfuric acid and hydrofluoric acid, with a specific weight ratio that optimizes the etching process. The conditions outlined in this patent allow for a SiARC etching rate of at least 50 nanometers per minute, demonstrating high selectivity over silicon oxide.
Another notable patent details a two-step process for etching semiconductor structures that include titanium-based layers. This method uniformly etches tungsten-based and titanium-based structures on a substrate, utilizing a sequence of wet etches with peroxide and heated nitric acid. The innovative approach ensures that other metals in the stack can be plasma-etched without interference from TiC residues.
Career Highlights
Gregory Nowling has worked with several notable companies throughout his career, including Intermolecular, Inc. and IBM. His experience in these organizations has allowed him to refine his expertise in semiconductor processing and contribute to groundbreaking innovations in the field.
Collaborations
Throughout his career, Gregory has collaborated with esteemed colleagues such as John S. Foster and John Anthony Fitzsimmons. These partnerships have fostered an environment of innovation and have led to the development of advanced technologies in semiconductor processing.
Conclusion
Gregory Nowling's contributions to semiconductor processing through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in technology, making him a significant figure in the industry.