Greg Siu

Title: Greg Siu: Innovator in Thin Film Technology

Introduction

Greg Siu is a notable inventor based in Saratoga, California. He has made significant contributions to the field of thin film technology, particularly through his innovative methods in atomic layer deposition.

Latest Patents

Greg Siu holds a patent for a "Method for forming TiSiN thin film layer by using atomic layer deposition." This patent describes a comprehensive process for creating a TiSiN thin film on a substrate. The method includes several steps: preheating the substrate while supplying an inert gas, forming a TiN film through a series of purging processes, creating a SiN film on the TiN layer, and finally achieving a TiSiN film of desired thickness. The patent specifies the gas pressure ranges and the composition of the thin film, ensuring high-quality results.

Career Highlights

Greg Siu is currently employed at Aixtron SE, a company known for its advanced deposition equipment. His work at Aixtron SE has allowed him to further develop his expertise in thin film technologies and contribute to the company's innovative projects.

Collaborations

Greg has collaborated with talented coworkers, including Woong Park and Young Jin Jang. Their combined efforts have led to advancements in the field and have fostered a collaborative environment for innovation.

Conclusion

Greg Siu's contributions to thin film technology through his patent and work at Aixtron SE highlight his role as an influential inventor in the industry. His innovative methods continue to pave the way for advancements in material science.