Gowri Damarla

Title: The Innovative Contributions of Gowri Damarla

Introduction

Gowri Damarla is a prominent inventor based in Boise, ID (US). She has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. Her work focuses on improving processes and apparatuses that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

One of her latest patents is titled "Process of planarizing a wafer with a large step height and/or surface area features." This invention involves a method where a blanket stop layer is conformally formed on a layer with a large step height. A first chemical mechanical polishing process is performed to remove the blanket stop layer atop the raised region. A second chemical mechanical polishing process is then conducted to planarize the wafer, utilizing the blanket stop layer as a stop layer when the layer is at the same level or lower than the blanket stop layer. This innovative approach allows for the easy removal of the raised region without causing dishing in the non-raised region, which is protected by the blanket stop layer.

Another notable patent is related to "Multi-tiered semiconductor apparatuses including residual silicide in semiconductor tier." This patent describes methods for forming multi-tiered semiconductor devices, including apparatuses that incorporate them. In this method, a silicide is formed in a tier of silicon, removed, and a device is created at least partially in the void left by the silicide. The apparatus includes a tier of silicon with a void between tiers of dielectric material, where residual silicide is present on the tier of silicon and/or on the tiers of dielectric material.

Career Highlights

Gowri Damarla has worked with notable companies in the semiconductor industry, including Nan Ya Technology Corporation and Micron Technology Incorporated. Her experience in these organizations has contributed to her expertise and innovative capabilities in semiconductor technology.

Collaborations

Throughout her career, Gowri has collaborated with talented individuals such as Anurag Jindal and Brett W Busch. These collaborations have likely fostered an environment of innovation and creativity, leading to the development of her impactful patents.

Conclusion

Gowri Damarla's contributions to semiconductor technology through her patents demonstrate her innovative spirit and expertise in the field. Her work continues to influence advancements in semiconductor devices, showcasing the importance of her inventions in the industry.