Company Filing History:
Years Active: 2010
Title: Innovations by Goujun Zhang: Advancements in Substrate Conditioning
Introduction: Goujun Zhang, an accomplished inventor based in Shanghai, China, has made significant contributions to the field of substrate conditioning technologies. With a focus on enhancing charge control mechanisms, his innovative work has resulted in one patent that addresses crucial aspects of measurement systems.
Latest Patents: Zhang's patent, titled "Substrate Conditioning for Corona Charge Control," introduces a sophisticated measurement system designed for taking readings in a test zone on a substrate's surface. This system comprises a chamber that creates a controlled environment wherein a surface treatment station dispenses a stabilizing chemical. A charge deposition station subsequently deposits a charge in the test zone, while a QV measurement station performs QV-based measurements. The integration of these stations ensures that reliable QV measurements are obtained by effectively managing charge spreading through the stabilizing chemical, ultimately improving measurement stability on reactive dielectric substrates like silicon oxynitride and high-k surfaces.
Career Highlights: Goujun Zhang currently works at Kla Tencor Corporation, a distinguished company recognized for its advances in technology and engineering solutions. His tenure there has been marked by his dedication to pushing the boundaries of how substrate conditioning can optimize electronic material performance.
Collaborations: Throughout his career, Zhang has collaborated with fellow innovators and professionals, including Nanchang Zhu and Jainou Shi, contributing to a collective advancement in the field and enhancing the quality and scope of their projects.
Conclusion: Goujun Zhang’s innovations in substrate conditioning exemplify the impact that dedicated inventors can have on technology. His patent not only improves measurement system reliability but also addresses critical challenges faced by the industry. As technologies continue to evolve, Zhang's work will undoubtedly influence future advancements in electronic materials and charge control mechanisms.