Kla Tencor Corporation

Goujun Zhang

Shiyou Pei

Nanchang Zhu

Xiafang Zhang

Joseph R Laia, Jr

Min Xiang

Jainou Shi

ZiangHua Liu

Liang-Guo Wang

A measurement system for taking a reading in a test zone on a surface of a substrate. A chamber forms an environment, a surface treatment station dispenses a stabilizing chemical in the test zone, a charge deposition station deposits a charge in the test zone, and a QV measurement station takes a QV based measurement in the test zone. Where the surface treatment station, the charge deposition station, and the QV measurement station all interact with the substrate within the chamber. In this manner, reliable QV measurements are taken on the substrate by controlling charge spreading with the stabilizing chemical. QV measurement stability is also improved by reducing the influence of the time trending on substrates with reactive dielectrics, such as on silicon oxynitride and high-k surfaces.

Substrate conditioning for corona charge control

Growing community of inventors

Shanghai, China

Goujun Zhang