Gladys Lo

Title: **Innovative Contributions of Gladys Lo in Semiconductor Manufacturing**

Introduction

Gladys Lo, an accomplished inventor based in Fremont, CA, has made significant contributions to the field of semiconductor manufacturing. With a total of three patents to her name, her work focuses on improving the efficiency and effectiveness of semiconductor device fabrication.

Latest Patents

One of Gladys's notable inventions is the patent for "Silicon Nitride Dry Trim Without Top Pulldown." This method involves forming devices with silicon gates over a substrate, where silicon nitride spacers are strategically placed on the sides of these gates. The innovation utilizes these spacers as masks for ion implantation, thus ensuring precision in forming ion implant regions. Furthermore, she has developed a technique for selectively depositing a nonconformal layer over the spacers and gates, allowing for a thicker layer on the tops while minimizing deposition on the sidewalls.

Another significant patent involves "Photoresist Stripping Chamber and Methods of Etching Photoresist on Substrates." Her invention outlines methods for processing substrates that protect active areas during the fabrication process. By utilizing an inductively coupled plasma processing chamber and maintaining a specific plasma potential, the substrate's active areas can be effectively passivated. This method entails using a siliane-free process gas, incorporating additives to create a protective layer that synergizes with the existing elements in the active region.

Career Highlights

Gladys Lo's professional journey includes her role at Lam Research Corporation, a leader in providing innovative manufacturing equipment and services to the semiconductor industry. Her expertise and patents demonstrate her commitment to advancing semiconductor technologies and enhancing manufacturing processes.

Collaborations

Throughout her career, Gladys has collaborated with esteemed colleagues such as Robert P Chebi and Erik A Edelberg. These partnerships have fostered a collaborative environment that drives innovation and facilitates the exchange of ideas within the semiconductor field.

Conclusion

Gladys Lo is recognized not only for her groundbreaking patents but also for her dedication to innovation in semiconductor manufacturing. Her work continues to influence the development of more efficient and effective manufacturing techniques, solidifying her status as a leading inventor in the industry. As technologies evolve, Gladys's contributions remain pivotal in shaping the future of semiconductor design and fabrication.