Location History:
- Somerville, NJ (US) (1994 - 2001)
- Bell Mead, NJ (US) (2003)
- Belle Mead, NJ (US) (2004 - 2011)
Company Filing History:
2 out of 2 
2 out of 2 
2 out of 2 
Years Active: 1994-2011
Title: Innovations of Gary S Tompa
Introduction
Gary S Tompa is a notable inventor based in Belle Mead, NJ (US), recognized for his contributions to substrate heating technologies. With a total of 10 patents to his name, Tompa has made significant advancements in the field of Chemical Vapor Deposition (CVD) systems and RF heating arrangements.
Latest Patents
One of his latest patents is the "RF heater arrangement for substrate heating apparatus." This invention features an RF heating system designed for substrates, incorporating a susceptor for support, multiple RF heating coils, and a platen positioned between the RF heating coil and the substrate. The platen is made from materials that heat under RF energy, radiating heat into the susceptor and substrate, thus ensuring a uniform temperature profile. This innovation minimizes levitation and enhances the heating process, making it beneficial for CVD apparatus that deposits materials on continuous tape or roll.
Another significant patent is the "Filament support arrangement for substrate heating apparatus." This apparatus supports the heater filament within a CVD system. It includes a recess in a filament support plate and an electrically isolated rod that supports the filament coils. A thermally insulating sleeve surrounds the rod, allowing controlled movement to prevent damage from thermal expansion while providing necessary support.
Career Highlights
Throughout his career, Gary S Tompa has worked with various companies, including Structured Materials Industries Inc. and Ambp Tech Corporation. His work has focused on enhancing substrate heating technologies, contributing to advancements in the semiconductor and materials deposition industries.
Collaborations
Tompa has collaborated with notable professionals in his field, including James F Garvey and Richard A Stall. These collaborations have furthered the development of innovative technologies in substrate heating.
Conclusion
Gary S Tompa's contributions to substrate heating technologies through his patents and collaborations highlight his significant role as an inventor. His work continues to influence advancements in the field, showcasing the importance of innovation in technology.