Company Filing History:
Years Active: 2000-2004
Title: Gail D Shelton: Innovator in Semiconductor Technology
Introduction
Gail D Shelton is a prominent inventor based in Colorado Springs, CO (US). She has made significant contributions to the field of semiconductor technology, holding a total of 15 patents. Her innovative work has paved the way for advancements in multilayer semiconductor devices.
Latest Patents
One of her latest patents is titled "Method for composing a dielectric layer within an interconnect structure of a multilayer semiconductor device." This patent discloses a method where a layer of silica precursor material is deposited on a silicon substrate. The layer is then dried without affecting its structure and porosity, transforming it into a porous silica film. Following this, a protective layer, such as parylene, is applied on top of the dried porous silica film. The thickness of this protective layer exceeds the peak-valley planarization requirements of the silicon substrate surface. Consequently, a composite porous silica film is formed, which serves as a dielectric layer within an interconnect structure. This innovative composite porous silica film features a relatively low dielectric constant and is resilient against damage from standard CMP procedures.
Career Highlights
Gail D Shelton has been a key figure at LSI Logic Corporation, where she has utilized her expertise to drive innovation in semiconductor technology. Her work has not only contributed to her personal achievements but has also significantly impacted the industry.
Collaborations
Throughout her career, Gail has collaborated with notable colleagues, including Gayle W Miller and Brynne K Chisholm. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Gail D Shelton's contributions to semiconductor technology through her patents and collaborations highlight her role as a leading inventor in the field. Her innovative methods continue to influence advancements in multilayer semiconductor devices.