Company Filing History:
Years Active: 2021-2025
Title: Fumiya Takata: Innovator in Plasma Processing Technology
Introduction
Fumiya Takata is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 6 patents. His innovative work has advanced the methods and apparatus used in etching and plasma processing.
Latest Patents
One of Takata's latest patents is an etching method that involves preparing a substrate with two distinct regions. The first region contains a first material, while the second region contains a different second material. The etching process utilizes plasma generated from a processing gas that includes a tungsten-containing gas, with the flow rate of this gas being the largest among all gases in the processing gas, excluding inert gases.
Another notable patent is for an apparatus and method for plasma processing. This apparatus is designed to generate plasma within a chamber and periodically applies a pulsed negative DC voltage to an upper electrode. This process is utilized for both plasma processing on a substrate and plasma cleaning. The duty ratio of the pulsed negative DC voltage for plasma processing is smaller than that used for plasma cleaning, ensuring efficient operation.
Career Highlights
Fumiya Takata is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has allowed him to focus on developing advanced technologies that enhance the efficiency and effectiveness of plasma processing.
Collaborations
Throughout his career, Takata has collaborated with notable colleagues, including Shinya Morikita and Toshikatsu Tobana. These collaborations have contributed to the development of innovative solutions in the field of plasma processing.
Conclusion
Fumiya Takata's contributions to plasma processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His advancements continue to influence the field and pave the way for future innovations.
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