This inventor holds 6 USPTO granted patents. Top assignees: Matsushita Electric Industrial Co., Ltd., Panasonic Corporation. Active years: 2006-2012.
Location History:
- Higashitonami-gun, JP (2006)
- Nanto, JP (2009)
- Toyama, JP (2006 - 2012)
Company Filing History:
4 out of 27,375 
2 out of 16,454 
Years Active: 2006-2012
Title: Fumitoshi Kawase: Innovator in Semiconductor Technology
Introduction
Fumitoshi Kawase is a notable inventor based in Toyama, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on advanced methods for elemental analysis and thermal processing in semiconductor manufacturing.
Latest Patents
Kawase's latest patents include an elemental analysis method and a semiconductor device manufacturing method. In the elemental analysis method, protons are introduced into a substrate at a specific incident angle, allowing for the measurement of characteristic X-rays emitted from the substrate. This technique enables the identification of impurity elements and provides detailed in-plane and in-depth distribution analysis. The method is particularly useful for analyzing metal contamination and quantifying impurity elements in semiconductor processes with high accuracy.
His second patent involves a method for thermal processing using a rapid thermal processing (RTP) technique. In this process, a wafer is initially kept in a low-temperature region and gradually heated to a specified thermal processing temperature. This approach ensures uniform thermal processing, independent of the wafer's surface conditions, which is crucial for achieving optimal results in semiconductor manufacturing.
Career Highlights
Throughout his career, Fumitoshi Kawase has worked with prominent companies such as Matsushita Electric Industrial Co., Ltd. and Panasonic Corporation. His experience in these organizations has allowed him to develop innovative solutions that address critical challenges in semiconductor technology.
Collaborations
Kawase has collaborated with notable colleagues, including Satoshi Shibata and Hisako Kamiyanagi. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
Fumitoshi Kawase is a distinguished inventor whose work in semiconductor technology has led to significant advancements in elemental analysis and thermal processing methods. His contributions continue to impact the industry positively, showcasing the importance of innovation in technology.