Location History:
- Kuwana, JP (1995)
- Kawasaki, JP (2005 - 2010)
Company Filing History:
Years Active: 1995-2010
Title: Inventor Fukashi Harada: Innovations in Semiconductor Manufacturing
Introduction
Fukashi Harada, an innovative inventor based in Kawasaki, Japan, has made significant contributions to the field of semiconductor technology. With a total of three patents to his name, Harada's work focuses on advanced manufacturing methods that enhance the efficiency and effectiveness of electronic devices.
Latest Patents
One of Harada's latest patents is a manufacturing method of electronic devices involving resist ashing. This method includes the steps of implanting phosphorous ions into a substrate semiconductor region made of silicon (Si) or silicon-germanium (SiGe) using a resist as a mask. The process continues with ashing the resist while it is heated in a vacuum environment, ensuring that the substrate remains at a temperature equal to or less than 130°C.
Another noteworthy patent is focused on a manufacturing method of semiconductor devices that incorporates an anisotropic etching step. This method involves forming an opening in a multilayer film on a semiconductor substrate, followed by the formation of a SiGe/SiGeC film with varying compositions across different layers and subsequent anisotropic dry etching to achieve the desired height of the opening.
Career Highlights
Fukashi Harada has worked with notable companies such as Fujitsu Corporation and Fujitsu Microelectronics Limited. His experience in these organizations has allowed him to develop and refine his expertise in semiconductor manufacturing techniques, making significant contributions to the advancement of technology in the electronics sector.
Collaborations
Throughout his career, Harada has collaborated with esteemed colleagues, including Jun-ichi Konno and Keisuke Shinagawa. These partnerships have fostered innovation and have resulted in the successful development of cutting-edge semiconductor technologies.
Conclusion
Fukashi Harada's innovative work in semiconductor manufacturing is marked by his unique patents and successful collaborations. His contributions continue to influence the industry, solidifying his reputation as a pivotal figure in the advancement of electronic devices and semiconductor technology.