Frederick T Turner

Title: Innovations of Frederick T. Turner

Introduction

Frederick T. Turner is a notable inventor based in Sunnyvale, California, with a remarkable portfolio of 13 patents. His contributions to the field of semiconductor processing and vacuum technology have significantly advanced the industry.

Latest Patents

Among his latest patents is the "Vacuum-processing chamber-shield and multi-chamber pumping method." This invention enhances the efficiency of multi-chamber vacuum processing apparatuses by providing a high gas flow conductance path to an exhaust volume maintained at high vacuum. The design eliminates the need for separate pumps for each chamber by utilizing a protective deposition shield that prevents contamination and allows for different operational pressures. Another significant patent is the "Clamp with wafer release for semiconductor wafer processing equipment." This apparatus features a retractable clamp that securely holds a substrate while minimizing particle contamination during the release process.

Career Highlights

Frederick has worked with Varian Associates, Inc., where he applied his expertise in semiconductor technology. His innovative designs have played a crucial role in improving processing techniques and equipment reliability.

Collaborations

Frederick has collaborated with notable professionals in the field, including Martin A. Hutchinson and R. Howard Shaw. Their combined efforts have contributed to advancements in semiconductor processing technologies.

Conclusion

Frederick T. Turner’s inventions and patents reflect his dedication to innovation in the semiconductor industry. His work continues to influence the development of efficient processing methods and equipment.