The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 17, 1990
Filed:
May. 26, 1989
Applicant:
Inventors:
Lawrence R Stark, San Jose, CA (US);
Frederick Turner, Sunnyvale, CA (US);
Assignee:
Varian Associates, Inc., Palo Alto, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414217 ; 1984682 ; 198394 ; 414222 ; 414751 ; 901 21 ;
Abstract
A modular wafer processing machine is provided which is based on interconnected handling units having wafer handling arms. Each unit can pass a wafer to another unit in the same vacuum environment to a processing module.
Published as: