Frederick A Palenschat

Title: Frederick A. Palenschat: Innovator in Gas Discharge Laser Systems

Introduction

Frederick A. Palenschat, based in San Diego, California, is a prominent inventor known for his groundbreaking work in the field of gas discharge laser systems. With a portfolio containing five patents, he has made significant contributions to the advancement of laser technology, particularly in high repetition rate systems.

Latest Patents

Among his latest innovations is the "6 KHz and above gas discharge laser system," which encompasses a unique system and method for operating a high repetition rate gas discharge laser. This innovative system features a gas discharge chamber designed with a hot chamber output window, which is heated during operation. Additionally, it includes an output laser light pulse beam path enclosure that incorporates an ambient temperature window and a cooling mechanism to manage the temperature between the output and the ambient window. Key to its functionality is the longitudinally and axially compliant ground rod, which provides mechanical support for the preionizer tube.

Another significant patent is the "High repetition rate laser produced plasma EUV light source." This patent describes an apparatus and methodology that employs a pulsed laser, operating at a carefully selected pulse repetition rate, to interact with a target formation system. This system coordinates the presentation of discrete targets that are guided by a target steering system, ultimately allowing for precise ignition at a designated site. The incorporation of a target tracking system ensures accurate information relay regarding the target's movement, enabling effective control signals for laser firing.

Career Highlights

Frederick A. Palenschat's career has been closely intertwined with Cymer, Inc., where he has honed his skills and expertise in laser technology. His inventive prowess has significantly impacted the development of high-performance laser systems that are utilized in various industries, including semiconductor manufacturing.

Collaborations

Throughout his career, Palenschat has collaborated with several notable professionals in the field, including Richard L. Sandstrom and Igor Vladimirovich Fomenkov. These collaborations have helped foster innovation and advancements in laser systems, contributing to the overall success of their projects at Cymer, Inc.

Conclusion

Frederick A. Palenschat represents a leading figure in the realm of gas discharge laser systems. With five patents to his name and a collaborative spirit, he continues to push the boundaries of innovation in laser technology. His work at Cymer, Inc. highlights the importance of skilled inventors in shaping the future of industrial applications.