The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2003
Filed:
Feb. 27, 2001
Ronald L. Spangler, Arlington, MA (US);
Robert N. Jacques, Andover, MA (US);
George J. Everage, Escondido, CA (US);
Stuart L. Anderson, San Diego, CA (US);
Frederick A. Palenschat, Lemon Grove, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
William N. Partlo, Poway, CA (US);
John M. Algots, San Diego, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to three millisecond and on a very fast time frame of a few microseconds. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control and a piezoelectric load cell in combination with the piezoelectric driver to provide the very fast (few microseconds) wavelength control.