Company Filing History:
Years Active: 2010-2024
Title: Inventor Spotlight: Fred Egley from Sunnyvale, CA
Introduction: Fred Egley is a prominent inventor based in Sunnyvale, California. With an impressive portfolio of 12 patents, Egley has made significant contributions to the field of substrate processing technology. His innovative approaches have led to advancements that improve efficiency and performance in semiconductor manufacturing.
Latest Patents: Among Egley's most recent patents are two notable inventions that address critical challenges in plasma chambers and temperature control systems. The first patent involves a pioneering method for power and data transmission to substrate supports in plasma chambers via optical fiber. This assembly incorporates a first optical receiver, power converter, first circuit, and first optical transmitter, all integrated into a cohesive substrate support assembly.
The second patent presents a virtual metrology method for estimating the temperature of an electron shower cage (ESC) using thermal control elements. This technology includes a temperature controller that correlates temperatures of thermal control elements with the substrate support's temperature responses, ultimately enabling precise control based on real-time data.
Career Highlights: Egley is currently associated with Lam Research Corporation, a leading company in semiconductor fabrication equipment. His contributions have undoubtedly enhanced Lam's reputation as an innovator within the industry. Over his career, Egley has focused extensively on developing technologies that optimize semiconductor processing through improved temperature management and data transmission techniques.
Collaborations: Throughout his journey, Egley has collaborated with talented individuals such as Hong Shih and Michael S. Kang. These partnerships have facilitated the sharing of ideas and expertise, further propelling the advancements that Egley has achieved in his patented technologies.
Conclusion: Fred Egley's innovative spirit continues to influence the landscape of substrate processing technology. His dedication to improving efficiency and performance through patentable inventions highlights his value as an inventor in the semiconductor industry. As he continues to work at Lam Research Corporation, it will be exciting to see how Egley's future innovations will shape the technology of tomorrow.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.