The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2014
Filed:
Oct. 31, 2012
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Fred D. Egley, Sunnyvale, CA (US);
Michael S. Kang, San Francisco, CA (US);
Anthony L. Chen, Pleasanton, CA (US);
Jack Kuo, Pleasanton, CA (US);
Hong Shih, Walnut, CA (US);
Duane Outka, Fremont, CA (US);
Bruno Morel, Santa Clara, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/461 (2006.01); C03C 15/00 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.