Location History:
- San Francisco, CA (US) (2010 - 2014)
- San Ramon, CA (US) (2013 - 2019)
Company Filing History:
Years Active: 2010-2019
Title: Innovations by Michael S. Kang
Introduction
Michael S. Kang is a prominent inventor based in San Francisco, CA. He has made significant contributions to the field of gas delivery systems, particularly in the semiconductor manufacturing industry. With a total of 12 patents to his name, Kang's work has been instrumental in advancing technologies used in plasma etch reactors.
Latest Patents
One of his latest patents is a gas distribution system for a ceramic showerhead of a plasma etch reactor. This innovative gas delivery system includes gas connection blocks and a gas ring, designed to ensure that process gas is delivered efficiently to the showerhead. The gas ring features a bottom ring with channels and a welded cover plate, allowing for equal gas flow to multiple outlets.
Another notable patent is the gas distribution showerhead for an inductively coupled plasma etch reactor. This two-piece ceramic showerhead consists of upper and lower plates that facilitate the delivery of process gas to the processing chamber. The design includes radially extending gas passages and a plenum, which enhances the efficiency of gas delivery during etching and deposition processes.
Career Highlights
Michael S. Kang is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in the development of advanced gas delivery systems that are critical for modern manufacturing processes.
Collaborations
Kang has collaborated with several talented individuals in his field, including coworkers Alex Paterson and Ian J. Kenworthy. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies.
Conclusion
Michael S. Kang's contributions to the field of gas delivery systems have made a lasting impact on the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in technology, showcasing his dedication to improving manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.