The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
May. 24, 2010
Anthony Ricci, Sunnyvale, CA (US);
Saurabh Ullal, Union City, CA (US);
Michael Kang, San Ramon, CA (US);
Matthew Busche, Santa Clara, CA (US);
Anthony Ricci, Sunnyvale, CA (US);
Saurabh Ullal, Union City, CA (US);
Michael Kang, San Ramon, CA (US);
Matthew Busche, Santa Clara, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in fluid communication with the flow passage, a supply line in fluid communication with the inlet, and a return line in fluid communication with the outlet; a first recirculator providing liquid at temperature Tin fluid communication with the supply line and the return line; a second recirculator providing liquid at temperature Tin fluid communication with the supply line and the return line, temperature Tbeing at least 10° C. above temperature T; a pre-cooling unit providing liquid at temperature Tconnected to the inlet and the outlet, temperature Tbeing at least 10° C. below T; a pre-heating unit providing liquid at temperature Tconnected to the inlet and the outlet, temperature Tbeing at least 10° C. above T; a controller operable to selectively operate valves of the recirculation system to recirculate liquid between the flow passage and the first recirculator, the second recirculator, the pre-cooling unit or the pre-heating unit.