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Pleasanton, CA, United States of America

Anthony L Chen

USPTO Granted Patents = 10

Average Co-Inventor Count = 3.3

ph-index = 6

Forward Citations = 95(Granted Patents)

Location History:

Oakland, CA (US) (2000 - 2004)
Pleasanton, CA (US) (2004 - 2014)

Company Filing History:

10 out of 3,768

Lam Research Corporation

Years Active: 2000-2014

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8859432 - Bare aluminum baffles for resist stripping chambers (2014-10-14),

2. 8313635 - Bare aluminum baffles for resist stripping chambers (2012-11-20),

3. 7811409 - Bare aluminum baffles for resist stripping chambers (2010-10-12),

4. 7578945 - Method and apparatus for tuning a set of plasma processing steps (2009-08-25),

5. 7138067 - Methods and apparatus for tuning a set of plasma processing steps (2006-11-21),

6. 6777173 - H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist strip (2004-08-17),

7. 6770214 - Method of reducing aluminum fluoride deposits in plasma etch reactor (2004-08-03),

8. 6344151 - Gas purge protection of sensors and windows in a gas phase processing reactor (2002-02-05),

9. 6074516 - High sputter, etch resistant window for plasma processing chambers (2000-06-13),

10. 6071375 - Gas purge protection of sensors and windows in a gas phase processing (2000-06-06),

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