Fred E Mitchel

Title: Innovations by Fred E. Mitchel

Introduction

Fred E. Mitchel is a notable inventor based in Phoenix, AZ, with a focus on advancements in semiconductor technology. He holds a total of 3 patents that showcase his contributions to the field of chemical mechanical polishing and wafer processing.

Latest Patents

One of his latest patents is for a multi-step chemical mechanical polishing (CMP) system. This innovative system is designed to polish a wafer to form metal interconnects in a dielectric layer. The first polish removes an upper portion of the metal layer using a specific slurry and set of polishing parameters, leaving residual metal within the dielectric layer to serve as the metal interconnects. The second polish clears the barrier layer from the upper surface of the dielectric layer, thereby forming the metal interconnect. This process is optimized to reduce dishing and dielectric erosion, ensuring high-quality results in semiconductor manufacturing.

Another significant patent by Mitchel involves a semiconductor wafer polishing apparatus with a variable polishing force. This apparatus features a carrier head that includes a rigid plate with open fluid channels and a flexible wafer carrier membrane. The design allows for precise control over the polishing process, enhancing the efficiency and effectiveness of wafer processing.

Career Highlights

Throughout his career, Fred E. Mitchel has worked with several prominent companies, including Speedfam-IPEC Corporation and Integrated Process Equipment Corporation. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.

Collaborations

Mitchel has collaborated with notable professionals in the field, including Chris E. Barns and Malek Charif. These collaborations have further enriched his work and contributed to advancements in semiconductor processing technologies.

Conclusion

Fred E. Mitchel's contributions to the field of semiconductor technology through his patents and career experiences highlight his role as an influential inventor. His work continues to impact the industry, paving the way for future innovations in wafer processing.