Company Filing History:
Years Active: 2019-2021
Title: Frank Li: Innovator in Optical Instrumentation
Introduction
Frank Li is a notable inventor based in Danville, CA (US), recognized for his contributions to optical instrumentation. With a total of 3 patents, he has made significant advancements in the field, particularly in light scattering technologies.
Latest Patents
One of Frank Li's latest patents is an "Air scattering standard for light scattering based optical instruments and tools." This innovative inspection system utilizes an air scatter standard that includes illumination sources to generate a beam of illumination. The system is designed to focus this beam into a volume of air within an inspection chamber, employing collection optics to gather scattered illumination. A detector receives this collected illumination, while a controller processes the signals to determine the state of the beam based on intensity or polarization comparisons with a predetermined air scatter standard.
Another significant patent is focused on "Minimizing filed size to reduce unwanted stray light." This invention addresses the reduction of stray and air-scattered light by configuring the size of the sensor's collection area. By adjusting this size, the system minimizes sensitivity-limiting noise, particularly in deep ultraviolet light scenarios. A servo mechanism is employed to control the position of the illumination spot collected by the time delay and integration sensor.
Career Highlights
Frank Li has worked with prominent companies in the industry, including KLA-Tencor Corporation and KLA Corporation. His experience in these organizations has contributed to his expertise in optical technologies and instrumentation.
Collaborations
Throughout his career, Frank has collaborated with talented individuals such as Zhiwei Xu and Qing Li, enhancing his work through shared knowledge and innovation.
Conclusion
Frank Li's contributions to optical instrumentation through his patents and career achievements highlight his role as a significant innovator in the field. His work continues to influence advancements in light scattering technologies.
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