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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10739276 B1

PDFFull Text
Date of Patent:
Aug. 11, 2020

Filed:

Dec. 01, 2017

Minimizing filed size to reduce unwanted stray light

Applicant:

Kla-tencor Corporation, Milpitas, CA (US);

Inventors:

Donald Pettibone, San Jose, CA (US);

Daniel Ivanov Kavaldjiev, San Jose, CA (US);

Chuanyong Huang, San Jose, CA (US);

Qing Li, San Jose, CA (US);

Frank Li, Danville, CA (US);

Zhiwei Xu, Sunnyvale, CA (US);

Assignee:

KLA-Tencor Corporation, Milpitas, CA (US);

Attorney:

Hodgson Russ LLP

Primary Examiner:

David P Porta

Assistant Examiner:

Djura Malevic

Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01J 1/02 (2006.01); G01J 1/04 (2006.01); G01J 1/42 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01J 1/0214 (2013.01); G01J 1/0219 (2013.01); G01J 1/0266 (2013.01); G01J 1/0437 (2013.01); G01J 1/429 (2013.01); G01J 1/4228 (2013.01); G01N 2201/064 (2013.01);
Abstract

Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.

Find Patent Forward Citations

Pettibone, Donald. (2020). Minimizing filed size to reduce unwanted stray light (U.S. Patent No. 10739276). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10739276

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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