The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Dec. 01, 2017
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Donald Pettibone, San Jose, CA (US);
Daniel Ivanov Kavaldjiev, San Jose, CA (US);
Chuanyong Huang, San Jose, CA (US);
Qing Li, San Jose, CA (US);
Frank Li, Danville, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01J 1/02 (2006.01); G01J 1/04 (2006.01); G01J 1/42 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01J 1/0214 (2013.01); G01J 1/0219 (2013.01); G01J 1/0266 (2013.01); G01J 1/0437 (2013.01); G01J 1/429 (2013.01); G01J 1/4228 (2013.01); G01N 2201/064 (2013.01);
Abstract
Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.