This inventor holds 3 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2003-2010.
Company Filing History:
Years Active: 2003-2010
Title: Feng-Jia Shih: Innovator in Semiconductor Technology
Introduction
Feng-Jia Shih is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the manufacturing processes of semiconductor devices.
Latest Patents
Feng-Jia Shih's latest patents include innovative methods that address critical challenges in semiconductor fabrication. One notable patent is a method of forming planarized coatings on contact hole patterns of various duty ratios. This method involves using a first photoresist made of a Novolac resin and a diazonaphthoquinone photoactive compound, which is coated on a substrate and baked to allow it to reflow and fill holes. The photoresist is then exposed without a mask, allowing for precise thinning to a recessed depth within the holes. After hardening the photoresist, a second photoresist is applied to create a planarized film with minimal thickness variation. This technique is particularly useful in forming trench patterns in dual damascene methods and in fabricating MIM capacitors.
Another significant patent is a method to preserve alignment mark optical integrity during a chemical mechanical polishing (CMP) process. This method involves forming multiple material layers over a semiconductor wafer and lithographically patterning them to protect alignment mark areas during the CMP process. These innovations demonstrate Feng-Jia Shih's commitment to advancing semiconductor manufacturing techniques.
Career Highlights
Feng-Jia Shih is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to collaborate with other talented professionals and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Feng-Jia Shih has worked alongside notable colleagues such as Chia-Tung Ho and Jieh-Jang Chen. Their collaborative efforts have further propelled innovations in the semiconductor field, showcasing the importance of teamwork in achieving technological advancements.
Conclusion
Feng-Jia Shih is a distinguished inventor whose contributions to semiconductor technology have made a significant impact on the industry. His innovative patents and collaborative spirit exemplify the essence of progress in this vital field.