Company Filing History:
6 out of 6 
3 out of 972 
2 out of 9,138 
Years Active: 1993-2012
Title: The Innovations of Farhang F Shadman
Introduction
Farhang F Shadman is a prominent inventor based in Tucson, AZ (US). He has made significant contributions to the field of micro-device manufacturing, holding a total of 12 patents. His work focuses on improving processes in the production of integrated circuits (ICs), micro-electromechanical systems (MEMS), and other micro-devices.
Latest Patents
Shadman's latest patents include a "Method of manufacture of wafers using an electro-chemical residue sensor (ECRS)." This innovative method enhances the clean, rinse, and dry processes during the manufacturing of ICs and MEMS. It conserves solution and energy while ensuring that the process is completed within a specified time frame. The ECRS provides in-situ and real-time measurements of residual contamination on surfaces or within void micro features, which are representative of conditions on production wafers. These measurements are crucial for designing and optimizing production processes.
Another notable patent is the "Method of monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS)." This method also aims to improve the manufacturing processes of ICs and MEMS. The ECRS measures impedance to determine how process variables affect the rate of change of the measured impedance. This real-time monitoring allows for better control of process conditions and the transfer of patterned wafers through various processes.
Career Highlights
Throughout his career, Farhang F Shadman has worked with notable organizations such as Environmental Metrology Corporation and the University of Arizona. His experience in these institutions has contributed to his expertise in the field of micro-device manufacturing.
Collaborations
Shadman has collaborated with several professionals in his field, including Bert M Vermeire and Kon-Tsu Kin. These collaborations have further enriched his work and innovations.
Conclusion
Farhang F Shadman is a distinguished inventor whose work has significantly impacted the manufacturing processes of micro-devices. His innovative patents and career achievements reflect his dedication to advancing technology in this field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.