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Forward Citations = 31

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2 inventors (with patents filed for the assignee):

Farhang F Shadman (6 out of 12 patents)

Bert M Vermeire (6 out of 11 patents)

6 patents: Sort by Forward Citations

1. 8253422 - Method of manufacture of wafers using an electro-chemical residue sensor (ECRS) (2012-08-28),

2. 8120368 - Method of monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS) (2012-02-21),

3. 7932726 - Method of design optimization and monitoring the clean/rinse/dry processes of patterned wafers using an electro-chemical residue sensor (ECRS) (2011-04-26),

4. 7489141 - Surface micro sensor and method (2009-02-10),

5. 7332902 - Micro sensor for electrochemically monitoring residue in micro channels (2008-02-19),

6. 7317317 - Shielded micro sensor and method for electrochemically monitoring residue in micro features (2008-01-08),

Environmental Metrology Corporation specializes in providing quality metrology services to ensure accuracy, reliability, and compliance for environmental monitoring instruments. With a team of highly skilled technicians and state-of-the-art equipment, we offer calibration, certification, and repair services for a wide range of environmental monitoring equipment. Our commitment to quality and customer satisfaction sets us apart as a trusted partner in the industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

6 Patents

#100 in Tucson, AZ

#594 in Arizona

#43,795 in US

Tucson, AZ, United States of America

Environmental Metrology Corporation

Forward Citations = 31

2 inventors:

Farhang F Shadman (6 out of 12 patents)

Bert M Vermeire (6 out of 11 patents)

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