The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
May. 25, 2004
Applicants:
Kon-tsu Kin, Hsinchu, TW;
Pei-lin Chang, Hsinchu, TW;
Farhang Shadman, Tucson, AZ (US);
Hsiao-fen Cheng, Hsinchu, TW;
Inventors:
Kon-Tsu Kin, Hsinchu, TW;
Pei-Lin Chang, Hsinchu, TW;
Farhang Shadman, Tucson, AZ (US);
Hsiao-Fen Cheng, Hsinchu, TW;
Assignee:
Industrial Technology Research Institute, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 19/00 (2006.01); C02F 1/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
In order to reduce a total organic carbon (TOC) in ultrapure water to a level less than 1 ppb, several cycles of ozone contact/UV irradiation treatments are carried out in sequence. Preferably, the first cycle further includes an ion exchange treatment which is applied to the resulting UV irradiation water.