Fajun Yang is a notable inventor based in Taipa, Macau. He has made significant contributions to the field of semiconductor processing, holding a total of 5 patents. His work focuses on enhancing the efficiency and effectiveness of cluster tool systems used in semiconductor manufacturing.

Latest Patents

Fajun Yang's latest patents include innovative technologies that improve the control and operation of cluster tool apparatuses. One of his patents describes a system and method for controlling a cluster tool apparatus, which includes multiple processing modules and a robot designed to handle semiconductor products. This method allows for the optimization of processing cycles by receiving user-defined system parameters and determining schedules based on product residency times. Another patent outlines a multi-cluster tool system that processes semiconductor products using several adjacent cluster tools, incorporating a buffer module to enhance operational efficiency. This system also utilizes a controller to manage robot operations based on a defined processing schedule.

Career Highlights

Fajun Yang is affiliated with the Macau University of Science and Technology, where he contributes to research and development in semiconductor technologies. His work has been instrumental in advancing the capabilities of semiconductor processing systems, making them more efficient and reliable.

Collaborations

Fajun Yang has collaborated with several esteemed colleagues, including Naiqi Wu and Mengchu Zhou. Their combined expertise has fostered innovative solutions in the semiconductor industry.

Conclusion

Fajun Yang's contributions to semiconductor processing technology through his patents and collaborations highlight his role as a leading inventor in this field. His work continues to influence advancements in semiconductor manufacturing processes.

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