Location History:
- Jestetten, DE (2006 - 2008)
- Ellwangen, DE (2013 - 2019)
Company Filing History:
Years Active: 2006-2019
Title: **Inventor Erich Schubert: Illuminating Advances in Microlithography**
Introduction
Erich Schubert, a prolific inventor based in Ellwangen, Germany, has made significant contributions to the field of microlithography. With a total of eight patents to his name, Schubert's work primarily focuses on innovations that enhance the efficiency and capabilities of exposure apparatuses used in the manufacturing of microelectronic devices.
Latest Patents
One of Schubert's noteworthy inventions is an illumination system specifically designed for illuminating a mask in a microlithographic exposure apparatus. This advanced system incorporates a pupil shaping optical subsystem along with illuminator optics that effectively illuminate a beam deflecting component. The innovative aspect of this system lies in its ability to determine properties of the beam deflecting component by analyzing the intensity distribution within the system pupil surface. Through this process, it ensures that the intensity distribution produced aligns closely with the determined specifications, while taking into account various aberrations that may arise from different optical components. This patent exemplifies Schubert's dedication to improving the precision and functionality of microlithographic techniques.
Career Highlights
Throughout his career, Schubert has worked with prominent companies, including Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these esteemed organizations has provided him with a robust foundation to develop innovative solutions for the microlithography sector.
Collaborations
In his professional journey, Schubert has collaborated with esteemed colleagues, including Alexander Kohl and Gerhard-Wilhelm Ziegler. These partnerships have played a pivotal role in fostering creativity and advancing technological innovations within their field.
Conclusion
Erich Schubert's contributions to microlithography are not only marked by his patents but also by the collaborations he has built throughout his career. As technology continues to evolve, Schubert's work remains crucial in paving the way for advancements in microelectronics, ensuring that the demands of the industry are met with precision and innovation.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.