The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2008
Filed:
May. 02, 2006
Wolfgang Singer, Aalen, DE;
Wilhelm Egle, Aalen, DE;
Markus Weiss, Aalen, DE;
Joachim Hainz, Aalen, DE;
Joachim Wietzorrek, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Frank Melzer, Utzmemmingen, DE;
Bernhard Gellrich, Aalen, DE;
Bernhard Geuppert, Aalen, DE;
Erich Schubert, Jestetten, DE;
Martin Antoni, Aalen, DE;
Wolfgang Singer, Aalen, DE;
Wilhelm Egle, Aalen, DE;
Markus Weiss, Aalen, DE;
Joachim Hainz, Aalen, DE;
Joachim Wietzorrek, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Frank Melzer, Utzmemmingen, DE;
Bernhard Gellrich, Aalen, DE;
Bernhard Geuppert, Aalen, DE;
Erich Schubert, Jestetten, DE;
Martin Antoni, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.