Company Filing History:
Years Active: 2004-2005
Certainly! Here is the article about inventor Engelbertus Antonius Fransiscus Van De Pasch.
Title: Innovator Spotlight: Engelbertus Antonius Fransiscus Van De Pasch
Introduction: Engelbertus Antonius Fransiscus Van De Pasch, a talented inventor based in Oirschot, Netherlands, is making waves in the field of lithographic projection with his groundbreaking patents.
Latest Patents:
1. *Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination*: In his latest patent, Van De Pasch addresses issues in a reflective lithographic projection apparatus by correcting shifts in the image of a mask pattern caused by variations in the position of the pattern surface. This innovation involves the use of interferometers to determine and map variations in the mask's position along the optical axis for precise control of the projection apparatus.
2. *Lithographic projection apparatus, device manufacturing method, device manufactured thereby and gas composition*: Van De Pasch's second patent focuses on enhancing the accuracy of lithographic projection apparatus by incorporating one or more color interferometric devices to determine the position of a movable table. He also introduces a purge gas source to prevent errors in interferometric measurements due to gas leakage, ensuring optimal performance.
Career Highlights: Engelbertus Antonius Fransiscus Van De Pasch is a valuable asset to ASML Netherlands B.V., a prominent company in the innovation space. His contributions have significantly impacted the development of lithographic projection technology, reflecting his expertise and dedication to the field.
Collaborations: Van De Pasch has had the privilege of collaborating with skilled professionals such as Marcel Hendrikus Maria Beems and Hendricus J. M. Meijer. This collaborative environment has fostered creativity and led to the successful implementation of innovative ideas in the patents he has developed.
Conclusion: Engelbertus Antonius Fransiscus Van De Pasch's inventive spirit and technical acumen have positioned him as a key figure in advancing lithographic projection technology. His patents showcase a deep understanding of the industry's challenges and a relentless pursuit of solutions to enhance precision and efficiency in manufacturing processes.
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