Company Filing History:
Years Active: 2017-2020
Title: The Innovations of Elliott Franke: A Trailblazer in Semiconductor Technology
Introduction
Elliott Franke, based in Albany, NY, is a notable inventor with an impressive portfolio of four patents. His work primarily focuses on advanced methods and systems in semiconductor manufacturing, significantly contributing to the field's technological advancements.
Latest Patents
Elliott's latest innovations include two significant patents. The first patent, titled "Methods and Systems for Patterning of Low Aspect Ratio Stacks," describes a method that involves receiving a substrate with a patterned organic planarizing layer (OPL) mask. This method details a cyclical process that includes a partial etch of the dielectric layer and the deposition of a capping material until the dielectric layer is removed to a target depth, resulting in a patterned substrate with a target line edge roughness (LER).
The second patent, "Method for Fully Self-Aligned Via Formation Using a Directed Self Assembly (DSA) Process," outlines a process for creating a back-end-of-line (BEOL) metal line layer. This patent discusses how a block copolymer (BCP) can be formed on a patterning layer, followed by selective etching to create a recess above a selected metal line, thus facilitating the overlaying of an interconnecting layer of metal lines.
Career Highlights
Elliott Franke is currently employed at Tokyo Electron Limited, a prestigious company renowned for its contributions to semiconductor technology and manufacturing equipment. His role at the company has allowed him to employ his innovative ideas in practical applications, driving progress in the industry.
Collaborations
Throughout his career, Elliott has worked collaboratively with other experts in the field, including Nihar Mohanty and Richard Farrell. These partnerships have enriched his research and have led to the successful development of his patented technologies.
Conclusion
Elliott Franke stands out as a prominent figure in the semiconductor industry, demonstrating a commitment to innovation through his patented inventions. His expertise and collaborative efforts have not only propelled his career but have also contributed to advancing technologies that drive the industry forward. As semiconductor manufacturing continues to evolve, Elliott’s contributions will undoubtedly leave a lasting impact.