Pembroke Pines, FL, United States of America

Edward M Yokley

USPTO Granted Patents = 8 

Average Co-Inventor Count = 2.1

ph-index = 5

Forward Citations = 46(Granted Patents)


Location History:

  • Pembroke Pines, FL (US) (2003 - 2004)
  • Penbroke Pines, FL (US) (2003 - 2005)

Company Filing History:


Years Active: 2003-2005

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8 patents (USPTO):Explore Patents

Title: The Innovations of Edward M. Yokley: Pioneering Advances in Polymer Technology

Introduction: Edward M. Yokley, an accomplished inventor based in Pembroke Pines, FL, has made significant contributions to the field of chemical-mechanical polishing. With a total of eight patents to his name, Yokley's work focuses on enhancing the polishing processes used in semiconductor manufacturing, a critical component in modern electronics.

Latest Patents: Among his latest innovations are two notable patents. The first, titled "Selective Chemical-Mechanical Polishing Properties of a Cross-Linked Polymer and Specific Applications Therefor," presents a method for polishing surfaces on substrates, particularly semiconductor wafers. This invention includes a polishing pad made from cross-linked polymer materials that can be integrated into polishing apparatuses. The method involves positioning the substrate with a layer against the polishing body and executing the polishing process.

The second patent, "Method for Preparing a Polymer for Chemical Mechanical Polishing," outlines a preparation method for a thermoplastic foam substrate intended for chemical-mechanical polishing of semiconductor substrates. This process incorporates the use of plasma reactants to modify the surface, enhancing its effectiveness during polishing operations.

Career Highlights: Edward M. Yokley has made a mark through his work at Psiloquest Inc., where he has evolved as a key innovator in the field of material science and semiconductor processing. His dedication to advancing chemical-mechanical polishing techniques has made him a respected figure among his peers and within the industry.

Collaborations: Throughout his career, Yokley has collaborated with esteemed colleagues such as Yaw S. Obeng and Kathleen Richardson. These partnerships have facilitated knowledge exchange and innovation, propelling forward their collective research and development initiatives.

Conclusion: Edward M. Yokley's contributions to the field of polymer technology and semiconductor processing underscore his role as an influential inventor. His latest patents reflect a commitment to improving manufacturing processes, ensuring that advancements in technology continue to progress efficiently.

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