Edward K Yeh

Title: **Edward K. Yeh: Innovator in Semiconductor Technology**

Introduction

Edward K. Yeh, a notable inventor based in San Jose, CA, has made significant contributions to the field of semiconductor technology throughout his career. With a total of four patents to his name, Yeh's innovations have paved the way for improved manufacturing processes in the industry.

Latest Patents

Yeh's latest patents focus on advanced methods for optimizing transistor gate structures. One of his notable inventions is a method for removing silicon oxynitride material using a wet chemical process after gate etch processing. This method enables the formation of a transistor gate structure by creating a gate oxide layer, depositing gate material, and utilizing a wet chemical process to remove the silicon oxynitride region from the top of the gate structure, ultimately leading to enhanced performance of semiconductor devices.

Additionally, Yeh has patented a method for achieving a consistent shallow trench etch profile, which is particularly useful in sub-micron semiconductor processes. This trench isolation process improves the etch profile among both dense and isolated lines by employing a dielectric stack of silicon dioxide, silicon nitride, and silicon oxynitride. By utilizing silicon oxynitride as a hard mask, the process reduces variations in sidewall slope, resulting in greater consistency and precision in manufacturing.

Career Highlights

Over the years, Edward K. Yeh has been associated with significant companies including VLSI Technology, Inc. and Philips Electronics North America Corporation. His experience in these organizations has allowed him to hone his skills and develop innovative solutions that address challenges in semiconductor technology.

Collaborations

Yeh has had the opportunity to collaborate with talented individuals throughout his career, including Calvin T. Gabriel and Tammy D. Zheng. These partnerships have contributed to the advancement of technologies within the semiconductor field and reflect Yeh's commitment to innovation and teamwork.

Conclusion

Edward K. Yeh's contributions to semiconductor technology, demonstrated through his patents and collaborations, underscore his role as a leading inventor in the industry. His innovative approaches continue to influence the development of semiconductor manufacturing processes, making him a significant figure in the field of electronics.