Edith Lattard

Title: Innovations by Edith Lattard

Introduction

Edith Lattard is a notable inventor based in Trets, France. She has made significant contributions to the field of semiconductor technology, particularly in the development of methods for improving DRAM chip fabrication. With a total of 2 patents to her name, her work has had a substantial impact on the industry.

Latest Patents

One of her latest patents is titled "Method of forming insulating spacers in DRAM chips." This invention discloses an improved method for forming spacers that isolate the gate conductor from the metal contact with the diffusion region of each array transfer transistor in DRAM chips. The method involves a structure consisting of a silicon substrate with a diffusion region and gate conductor lines. An oxynitride layer and a silicon nitride layer are deposited in sequence, followed by anisotropic dry etching to form the silicon nitride spacers. This method significantly reduces the risk of electrical shorts between the gate conductor and metal contacts.

Another patent by Lattard is "Method of forming buried straps in DRAMs." This invention describes a process that begins with a patterned silicon substrate and deep trenches filled with doped polysilicon. A dielectric film is interposed to create a storage capacitor. The method includes a two-step dry etching process that exposes the upper part of the silicon substrate without damage. The trench is then filled with a layer of doped polysilicon, creating a buried strap that enhances product reliability and simplifies the process flow.

Career Highlights

Edith Lattard has had a distinguished career at International Business Machines Corporation (IBM). Her innovative approaches to semiconductor manufacturing have positioned her as a key figure in the field. Her patents reflect her commitment to advancing technology and improving manufacturing processes.

Collaborations

Throughout her career, Lattard has collaborated with notable colleagues, including Philippe Coronel and Renzo Maccagnan. These partnerships have contributed to her success and the advancement of her inventions.

Conclusion

Edith Lattard's contributions to the field of semiconductor technology through her innovative patents have made a lasting impact on the industry. Her work continues to influence the development of more efficient and reliable DRAM chips.