Edgar Kehrberg

Title: Edgar Kehrberg: Innovator in Substrate Testing Technologies

Introduction

Edgar Kehrberg is a notable inventor based in Haar, Germany, recognized for his contributions to substrate testing technologies. With a total of three patents to his name, Kehrberg has made significant advancements in methods and apparatuses that enhance the precision and efficiency of substrate positioning and testing.

Latest Patents

One of Kehrberg's latest patents is titled "Methods and apparatus for determining a position of a substrate relative to a support stage." This innovative sensing system features a plurality of probes arranged around a stage designed to support a substrate. Each probe is equipped with a detection portion that moves from a known starting position toward the edge of the substrate. It detects the edge while generating a detection signal and stops moving once the edge is detected. A controller then determines the edge position of the substrate based on the known starting position and the generated detection signals.

Another significant patent is the "Large substrate test system," which outlines a system and method for testing substrates. This system includes a load lock chamber, a transfer chamber, and a test station. The load lock chamber and test station are positioned one above the other and connected to the transfer chamber. A robot within the transfer chamber is designed to move substrates between the load lock chamber and the test station, facilitating efficient testing processes.

Career Highlights

Edgar Kehrberg is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work focuses on developing advanced technologies that improve substrate testing and positioning, contributing to the overall efficiency of manufacturing processes.

Collaborations

Throughout his career, Kehrberg has collaborated with notable colleagues, including Matthias Brunner and Shinichi Kurita. These collaborations have fostered innovation and the development of cutting-edge technologies in the field.

Conclusion

Edgar Kehrberg's contributions to substrate testing technologies through his patents and work at Applied Materials, Inc. highlight his role as a significant innovator in the industry. His advancements continue to influence the efficiency and precision of substrate testing processes.