The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
Jul. 29, 2004
Matthias Brunner, Kirchheim, DE;
Shinichi Kurita, San Jose, CA (US);
Wendell T. Blonigan, Pleasanton, CA (US);
Edgar Kehrberg, Haar, DE;
Matthias Brunner, Kirchheim, DE;
Shinichi Kurita, San Jose, CA (US);
Wendell T. Blonigan, Pleasanton, CA (US);
Edgar Kehrberg, Haar, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and system for testing one or more large substrates are provided. In one or more embodiments, the system includes a testing chamber having a substrate table disposed therein. The substrate table is adapted to move a substrate within the testing chamber in various directions. More particularly, the substrate table includes a first stage movable in a first direction, and a second stage movable in a second direction, wherein each of the stages moves in an X-direction, Y-direction or both X and Y directions. The system further includes a load lock chamber at least partially disposed below the testing chamber, and a transfer chamber coupled to the load lock chamber and the testing chamber. In one or more embodiments, the transfer chamber includes a robot disposed therein which is adapted to transfer substrates between the load lock chamber and the testing chamber.