The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2008
Filed:
Feb. 19, 2004
Shinichi Kurita, San Jose, CA (US);
Emanuel Beer, San Jose, CA (US);
Edgar Kehrberg, Haar, DE;
Matthias Brunner, Kirchheim, DE;
Shinichi Kurita, San Jose, CA (US);
Emanuel Beer, San Jose, CA (US);
Edgar Kehrberg, Haar, DE;
Matthias Brunner, Kirchheim, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A sensing system includes a plurality of probes arranged in a spaced relation around a stage that is adapted to support a substrate. Each probe includes a detection portion adapted to move from a known starting position toward an edge of the substrate that is supported by the stage; detect the edge of the substrate while the substrate is supported by the stage; generate a detection signal following said detection; and stop moving toward the edge of the substrate following said detection. A controller may determine an edge position of the substrate relative to the stage based on the known starting position of each detection portion and based on the detection signal generated by each detection portion. Numerous other aspects are provided.